发明名称 METHOD FOR MANUFACTURING ELECTROPHOTOGRAPHIC PHOTORECEPTOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing an electrophotographic photoreceptor, by which a charge-up phenomenon and a secondary reaction are both highly suppressed. <P>SOLUTION: The method for manufacturing an electrophotographic photoreceptor comprises: applying an alternating voltage in square waves at a frequency of 3 kHz or more and 300 kHz or less between an electrode and a cylindrical substrate, so as to control a potential of one of the electrode and the cylindrical substrate to be alternately positive and negative with respect to a potential of the other; thereby decomposing a raw material gas; and forming a deposition film on the cylindrical substrate. In the method, the cylindrical substrate is held by a substrate holder and an assist holder in a longitudinally pressurized state by the holders; and one of an absolute potential difference between the electrode and the cylindrical substrate when the above one potential is positive, and an absolute potential difference between the electrode and the cylindrical substrate when the above one potential is negative, is less than an absolute value of a discharge sustaining voltage and the other is equal to or more than an absolute value of a discharge starting voltage. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013064950(A) 申请公布日期 2013.04.11
申请号 JP20110204650 申请日期 2011.09.20
申请人 CANON INC 发明人 ABE YUKIHIRO;OYAMA KAZUNARI;FURUSHIMA SATOSHI
分类号 G03G5/08;C23C16/24;C23C16/458;C23C16/509;H01L21/205;H05H1/24 主分类号 G03G5/08
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