SUBSTRATE TRANSFER SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE TRANSFER ROBOT

摘要

PROBLEM TO BE SOLVED: To provide a substrate transfer system capable of realizing miniaturization by reducing a robot installation area.

SOLUTION: A substrate transfer system 10 comprises a substrate transfer robot configured to transfer a substrate 110 from a substrate storage apparatus 11 to a processing apparatus 20 through an opening 202 formed on a side of the processing apparatus 20 by rotating an arm part (a first arm part 123 and a second arm part 124) and a hand part 125 within a horizontal plane, and to protrude an outer edge of a minimum turning area in a state that the substrate 110 is supported by the hand part 125 into the processing apparatus 20 through the opening 202.

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