| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a supporting substrate that allows preventing contamination due to an impurity, a method of manufacturing the supporting substrate, and a method of processing a semiconductor substrate using the supporting substrate. <P>SOLUTION: The supporting substrate reinforces a semiconductor substrate by bonding the supporting substrate onto the semiconductor substrate on thinning the semiconductor substrate, and is composed of a single-crystal silicon substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
