发明名称 |
ECHELLE DIFFRACTION GRATING, EXCIMER LASER, MANUFACTURING METHOD OF ECHELLE DIFFRACTION GRATING, AND ArF EXCIMER LASER |
摘要 |
An Echelle diffraction grating has a Littrow configuration. Each grating includes a resin layer made of light curing resin and having a thickness between 2 μm and 10 μm, and a reflective coating layer formed on the resin layer, having a thickness between 120 nm and 500 nm, and made of aluminum. An apex angle between a blazed surface and a counter surface is between 85° and 90°. A first blaze angle is an angle that maximizes diffraction efficiency of a set blazed order for incident light of a wavelength of 193.3 nm. A blaze angle has an initial value of a second blaze angle smaller than the first blaze angle. 0.25°≦̸bd−ba≦̸1.2° is satisfied where bd denotes the first blaze angle and ba denotes the second blaze angle.
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申请公布号 |
US2013089117(A1) |
申请公布日期 |
2013.04.11 |
申请号 |
US201213633343 |
申请日期 |
2012.10.02 |
申请人 |
CANON KABUSHIKI KAISHA;CANON KABUSHIKI KAISHA |
发明人 |
SUKEGAWA TAKASHI;KITAMURA TSUYOSHI;OKURA YUKINOBU |
分类号 |
H01S3/22;B23P11/00;G02B5/18 |
主分类号 |
H01S3/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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