发明名称 METHOD FOR MANUFACTURING CYLINDRICAL PIEZOELECTRIC ELEMENT, CYLINDRICAL PIEZOELECTRIC ELEMENT AND MICRODRIVE MECHANISM
摘要 <p>A cylindrical piezoelectric element (10) is manufactured by the following manufacturing method. The inner surface of a cylindrical piezoelectric material (3) has disposed thereon a reference electrode (5-21). The outer surface of the cylindrical piezoelectric material (3) has disposed thereon a plurality of drive electrodes (5-1, 5-2) having prescribed widths in the circumferential direction and extending from one end to the other end in the axial direction. A portion of the outer surface of the cylindrical piezoelectric material (3) in the vicinity of the one end of the cylindrical piezoelectric material (3) in the axial direction has disposed thereon a polarization electrode (5-11) in a manner in which the polarized electrode is in series with and electrically connected to the plurality of driving electrodes (5-1, 5-2) in the axial direction. A prescribed voltage is applied between the polarization electrode (5-11) and the reference electrode (5-21), the region of the cylindrical piezoelectric material (3) corresponding to the plurality of driving electrodes (5-1, 5-2) is polarized, and the polarization electrode (5-11) of the cylindrical piezoelectric material (3) is removed.</p>
申请公布号 WO2013051622(A1) 申请公布日期 2013.04.11
申请号 WO2012JP75689 申请日期 2012.10.03
申请人 OLYMPUS CORPORATION 发明人 SAKAI, NAGAHIDE
分类号 H01L41/22;G02B26/10;H01L41/09;H01L41/187 主分类号 H01L41/22
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