发明名称 |
METHOD FOR FORMING METAL FILM WITH TWINS |
摘要 |
A method for forming a metal film with twins is disclosed. The method includes: (a) forming a metal film over a substrate, the metal film being made of a material having one of a face-centered cubic crystal structure and a hexagonal close-packed crystal structure; and (b) ion bombarding the metal film at a film temperature lower than −20° C. in a vacuum chamber and with an ion-bombarding energy sufficient to cause plastic deformation of the metal film to generate deformation twins in the metal film. |
申请公布号 |
US2013089674(A1) |
申请公布日期 |
2013.04.11 |
申请号 |
US201213550789 |
申请日期 |
2012.07.17 |
申请人 |
CHUEH YU-LUN;CHAN TSUNG-CHENG;LIAO CHIEN-NENG |
发明人 |
CHUEH YU-LUN;CHAN TSUNG-CHENG;LIAO CHIEN-NENG |
分类号 |
B05D5/00;B05D3/06 |
主分类号 |
B05D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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