发明名称 METHOD FOR CALIBRATING A ROBOT MOUNTED ON ACTIVE MAGNETIC BEARINGS
摘要 Method for calibrating a robot mounted on active magnetic bearings and having a gripper, which is vertically positionable along the z axis and which is displaceable in a first magnetic bearing along the x axis and in a second magnetic bearing along the y axis, comprising : dividing the first and second magnetic bearings into in each case four mounting points (6a, 6b, 6c, 6d; 6e, 6f, 6g, 6h); defining the setpoint centre coordinates for the X, Y, Z axis and also the setpoint values for the angular positions delta, epsilon and transformation of the setpoint values into setpoint values for the vertical setpoint positions of the in each case four mounting points; specifying the actuating forces F1-F4 for the electromagnets of the in each case four mounting points; determining the current vertical positions in each case for the in each case four mounting points; measuring the current vertical position z of the in each case four mounting points and conversion into actual centre coordinates; comparing the actual centre coordinates with the setpoint centre coordinates, determining the deviation and repeating the preceding steps.
申请公布号 WO2012175473(A3) 申请公布日期 2013.04.11
申请号 WO2012EP61660 申请日期 2012.06.19
申请人 SEMILEV GMBH;OLDENDORF, ULRICH 发明人 OLDENDORF, ULRICH
分类号 H01L21/677;H01L21/68 主分类号 H01L21/677
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