Verfahren zur Verhinderung von Kontamination von Wafern, ein Verfahren zur Überprüfung von Wafern und Verfahren zur Herstellung von Wafern,申请号DE201111101877T-传众专利搜索

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发明名称	Verfahren zur Verhinderung von Kontamination von Wafern, ein Verfahren zur Überprüfung von Wafern und Verfahren zur Herstellung von Wafern
摘要
申请公布号	DE112011101877(T5)	申请公布日期	2013.04.11
申请号	DE201111101877T	申请日期	2011.06.01
申请人	SUMCO CORP.	发明人	KAMIYAMA, EIJI;AOKI, KENJI
分类号	H01L21/683;H01L21/677	主分类号	H01L21/683
代理机构		代理人
主权项
地址

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