| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electromechanical conversion element, a method of manufacturing the same, a droplet discharge head, and a droplet discharge device, capable of patterning and forming an electromechanical conversion film having the crystallinity of high quality in a simplified step. <P>SOLUTION: The electromechanical conversion element is manufactured by a manufacturing method which includes the steps of: forming a first electrode 11 on a substrate or a base material film; forming a ceramic thin-film 12' being patterned on the surface of the first electrode 11; forming an electromechanical conversion film 15 on the ceramic thin-film 12' [including a first step (forming a hydrophobic part by surface-reforming only the first electrode 11), a second step (forming a coat 14 by a CSD method by printing a precursor solution 22 on the ceramic thin-film 12'), a third step (thermally treating the coat 14), and a fourth step (forming the electromechanical conversion film 15 to be a wanted film thickness by repeating the first step to the third step)]; and forming a second electrode on the electromechanical conversion film 15, so as to configure the droplet discharge head and the droplet discharge device. <P>COPYRIGHT: (C)2013,JPO&INPIT |
