| 摘要 |
<P>PROBLEM TO BE SOLVED: To obtain a film, as a thin film, made of a complex oxide which contains a trivalent element A, a tetravalent element B, and oxygen O, and of which the composition formula is expressed by A<SB POS="POST">X</SB>B<SB POS="POST">6</SB>O<SB POS="POST">1.5X+12</SB>(wherein 6≤X≤30), by controlling an A/B composition ratio in the film to a desired value. <P>SOLUTION: A first raw material bottle 34, a second raw material bottle 36, and a third raw material bottle 38, which store, for example, an oxidant, an La (element A) feeding source, and an Si (element B) feeding source respectively, are connected to a main chamber 32. An La<SB POS="POST">2</SB>O<SB POS="POST">3</SB>film and an SiO<SB POS="POST">2</SB>film are sequentially laminated on a substrate 12 comprising Si (100) and the like, by feeding and purging an La source into/from the main chamber 32, feeding and purging an oxidant into/from the main chamber 32, feeding and purging an Si source into/from the main chamber 32, and feeding and purging an oxidant into/from the main chamber 32. The La/Si composition ratio in La<SB POS="POST">X</SB>Si<SB POS="POST">6</SB>O<SB POS="POST">1.5X+12</SB>that is finally obtained is controlled by adjusting the number of times ratio of feeding of the La source and the Si source. Further, the La source, the Si source, and the oxidant are made to flow in parallel with the horizontal upper-end surface of the substrate 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
