发明名称 SAMPLE HOLDER AND CHARGED PARTICLE BEAM APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a sample holder which enables a lid to be easily attached and detached and introduces a sample into a sample chamber without exposing the sample to the air. <P>SOLUTION: A sample holder 100 includes: a sample table 37 having an opening and holding a sample 39 therein; a lid 36 closing the opening of the sample table 37; a lid presser 38 provided at the sample table 37; a first butting part provided at the lid presser 38; and a second butting part which fits into the first butting part to press the lid 36 against the sample table 37, seals a space enclosed by the lid 36 and the sample 37, and is provided at the lid 36. The sample holder is provided for solving the above problem. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013065485(A) 申请公布日期 2013.04.11
申请号 JP20110204054 申请日期 2011.09.20
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 ONO MASAOMI;TAKEUCHI KOICHIRO;HOSOYA KOTARO
分类号 H01J37/20 主分类号 H01J37/20
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