| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser machining method capable of cutting a workpiece formed by crystalline quartz with good dimensional accuracy, and of preventing the occurrence of damage on the outer surface of the workpiece. <P>SOLUTION: A laser light L is focused onto the surface 3 of a crystalline quartz workpiece 1 as a laser light incident surface to form a modified region 7 along a planned cutting line 5 on the roughened back side 21 of the workpiece 1. Thereby, the occurrence of cracks exposed to the surface 3 is prevented, and the post-cutting dimensional accuracy of the workpiece 1 is improved. Further, since the processing threshold of the laser beam L is high, a large amount of energy of the laser beam L is consumed for formation of the modified region, and the laser beam L reaching the back side 21 being roughened scatters, resulting in less damage to the back side 21. <P>COPYRIGHT: (C)2013,JPO&INPIT |
