发明名称 ENCODER APPARATUS USING LIQUID TO SUPPRESS DETECTION FAILURE
摘要 An encoder apparatus comprises a first scale member with a scale region on which a scale is arranged; a detector that detects light from the scale region; and a retaining member with a retaining surface that is arranged so as to face a surface of the first scale member including the scale region via a predetermined gap, and that retains a liquid at least between the retaining surface and the first scale member.
申请公布号 US2013087696(A1) 申请公布日期 2013.04.11
申请号 US201213688685 申请日期 2012.11.29
申请人 NIKON CORPORATION;NIKON CORPORATION 发明人 MAKINOUCHI SUSUMU
分类号 G01D5/347;G01B7/14 主分类号 G01D5/347
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