发明名称 Methods of Processing Units Comprising Crystalline Materials, and Methods of Forming Semiconductor-On-Insulator Constructions
摘要 Some embodiments include methods of processing a unit containing crystalline material. A damage region may be formed within the crystalline material, and a portion of the unit may be above the damage region. A chuck may be used to bend the unit and thereby induce cleavage along the damage region to form a structure from the portion of the unit above the damage region. Some embodiments include methods of forming semiconductor-on-insulator constructions. A unit may be formed to have dielectric material over monocrystalline semiconductor material. A damage region may be formed within the monocrystalline semiconductor material, and a portion of the monocrystalline semiconductor material may be between the damage region and the dielectric material. The unit may be incorporated into an assembly with a handle component, and a chuck may be used to contort the assembly and thereby induce cleavage along the damage region.
申请公布号 US2013089966(A1) 申请公布日期 2013.04.11
申请号 US201113267522 申请日期 2011.10.06
申请人 QIN SHU;ZHANG MING;MICRON TECHNOLOGY, INC. 发明人 QIN SHU;ZHANG MING
分类号 H01L21/263 主分类号 H01L21/263
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