| 摘要 |
<P>PROBLEM TO BE SOLVED: To stabilize an output of an element on a surface of a thin film 11 by suppressing disturbance of an underflow even if a measurement range is expanded to a high flow rate side in an air flow rate measurement device. <P>SOLUTION: A groove 25 is provided in the range of an X-axis direction one side away from a position facing a thin film 11 and a Y-axis direction one side away from the position facing the thin film 11 on a bottom surface 20a of a recess 20 of a support member 7. Further, the groove 25 is provided so that an air flow direction in the groove 25 is inclined in the X-axis direction and the Y-axis direction and air introduced into the groove 25 flows to a back side of the thin film 11. Accordingly, the underflow is straightened to flow to the back side of the thin film 11 in a region on the X-axis direction one side away from the position facing the thin film 11 and on the Y-axis direction one side away from the position facing the thin film 11. Thus, the output of the element on the surface of the thin film 11 can be stabilized by suppressing disturbance of the underflow even if the measurement range is expanded to the high flow rate side in the air flow rate measurement device. <P>COPYRIGHT: (C)2013,JPO&INPIT |
