摘要 |
<P>PROBLEM TO BE SOLVED: To provide a nitride semiconductor laser element which has a high output and a long life, and in which a Catastrophic Optical Damage (COD) is hard to occur in a resonator end face. <P>SOLUTION: In a nitride semiconductor laser element 10 comprising: a nitride semiconductor layer 20; a resonator provided in the nitride semiconductor layer 20; and end face coat films 18 and 19 formed on mutually facing end faces of the resonator, a layer of the end face coat film 18 contacting with the nitride semiconductor layer 20 formed on at least one end face in laser beam emission side is composed of an AlN having film density of 2.83 g/cm<SP POS="POST">3</SP>or higher. <P>COPYRIGHT: (C)2013,JPO&INPIT |