发明名称 METHOD FOR ADJUSTING ALIGNMENT OF THIN FILM FORMING DEVICE, THIN FILM FORMING DEVICE, AND ELECTROMECHANICAL CONVERSION FILM, ELECTROMECHANICAL CONVERSION ELEMENT, LIQUID DROPLET DISCHARGE HEAD AND LIQUID DROPLET DISCHARGE DEVICE PRODUCED WITH THE METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a thin film forming device which can reduce the production cost, a produced electromechanical conversion element and a liquid droplet discharge device. <P>SOLUTION: In the first alignment adjustment process, a landing position 251 is captured by using a camera 205, and a substrate or a liquid drop head 201 is moved relatively so that the landing position 251 matches with an imaging standard position 252 of the camera 205. In the second alignment adjustment process, an irradiated spot is formed by irradiating a laser beam with laser red, the irradiated spot is captured by using the camera 205, and the substrate or the laser head is relatively moved so that the irradiated spot matches the standard imaging position of the camera 205. In the third alignment adjustment process, the direction of the substrate is adjusted after detecting the direction of the substrate based on the image of the shape of the alignment mark formed previously on the substrate, the image captured by the imaging means 205, and the mounting position of the substrate is adjusted by moving the substrate so that the alignment mark comes to the standard imaging position of the imaging means 205. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013063371(A) 申请公布日期 2013.04.11
申请号 JP20110202338 申请日期 2011.09.15
申请人 RICOH CO LTD 发明人 BANDO YOSHINORI;MACHIDA OSAMU;TASHIRO RYO;YAGI MASAHIRO
分类号 B01J19/12;G01B11/00;G01B11/26 主分类号 B01J19/12
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