| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a MEMS device damages to whose beam part are restrained. <P>SOLUTION: In a MEMS device having a supporting substrate (11), a floating part (15) floating in a vertical direction from the supporting substrate (11), and an anchor (30) linking the floating part (15) and the supporting substrate (11), the floating part (15) has a spindle part (17) and a beam part (20) linking the spindle part (17) and the anchor (30); the beam part (20) has a first region (21) linked to an end of the spindle part (17), a second region (22) linked to the anchor (30) and two linking parts (23) linking the first region (21) and the second region (22), and has an annular shape in a planar view; and the linking parts (23) have an arciform shape in a planar view, and one of their two end parts is linked to an end of the first region (21) while the other of the end parts is linked to an end of the second region (22). <P>COPYRIGHT: (C)2013,JPO&INPIT |
