| 摘要 |
A spectroscopic sensor (1) has a cavity layer (21) and first and second mirror layers (22, 23) facing each other via the cavity layer (21), and comprises: an interference filter section (20) that selectively transmits light within a prescribed wavelength range, according to the incident position; a light transmission substrate (3) arranged on the first mirror layer (22) side and which transmits light incident to the interference filter section (20); and a light detection substrate (4) arranged on the second mirror layer (23) side and which detects light that has passed through the interference filter section (20). The cavity layer (21) has: a filter region (24) interposed between the first and second mirror layers (22, 23); an annular encircling region (25) that encircles the filter region (24) at a prescribed distance from the filter region (24); and an annular connection region (26) that connects a terminal section (24e) on the light detection substrate (4) side of the filter region (24) and a terminal section (25e) on the light detection substrate (4) side of the encircling region (25). |
