发明名称 LASER DEVICE AND ULTRAVIOLET LIGHT GENERATION SYSTEM EQUIPPED WITH THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To generate a burst pulse of a stable pulse laser beam. <P>SOLUTION: The laser device may comprises: a master oscillator which outputs a pulse laser beam of a predetermined repetition frequency; at least one amplifier disposed on an optical path of the pulse laser beam; at least one optical shutter disposed on the optical path of the pulse laser beam; and a controller which opens and closes the optical shutter. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013065804(A) 申请公布日期 2013.04.11
申请号 JP20110250333 申请日期 2011.11.16
申请人 GIGAPHOTON INC 发明人 NOWAK KRZYSZTOF;WAKABAYASHI OSAMU;HOSHINO HIDEYUKI
分类号 H01S3/23;H01L21/027 主分类号 H01S3/23
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