| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape-measuring device, a shape-measuring method, and a method for manufacturing structures which can accurately measure the shape of an object to be measured. <P>SOLUTION: A shape-measuring device is provided with: an application part for forming pattern light having a prescribed light intensity distribution on an object to be measured; an imaging part including an imaging element for taking an image of pattern light applied to the object to be measured in a direction differing from an application direction in which light is applied to the object to be measured; an evaluation part for evaluating imaging signal of the image; and a processing part for performing predetermined processing for the imaging results of the imaging part on the basis of evaluation results of the evaluation part to calculate positional information on the object to be measured. <P>COPYRIGHT: (C)2013,JPO&INPIT |
