| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a novel power supply circuit for plasma generation device using a fabric structure electrode in a plasma generation section. <P>SOLUTION: The power supply circuit for a plasma generation device has a fabric structure electrode 20 consisting of a plurality of discharge electrodes 23 which comprise one autotransformer 21 for connection with a commercial power supply (e.g., AC 100(V), 60 (Hz)), a plurality of electronic transformers 22, and a fabric structure electrode. The autotransformer 21 may be a variable autotransformer. The variable autotransformer has an advantage that the voltage can be adjusted to an optimum level depending on the load. The same number of pairs of discharge electrodes 23 as those of the electronic transformers 22 are provided. Since the same number of electronic transformers 22 as those of the pairs of discharge electrodes 23 are provided, power can be fed stably to a plasma generation device having a fabric structure electrode in the plasma generation section. <P>COPYRIGHT: (C)2013,JPO&INPIT |
