Pyrometer pipe for measuring temperatures at measurement point within chambers in vacuum treatment plant, comprises a pyrometer having a specific end which is set with a transparent partition wall as particle shield, in measuring range

摘要

The pyrometer pipe (1) includes a pyrometer (5) which is arranged along the measurement axis (7) at the measurement point (6) and having two ends (12,13). The first end is set at the measuring point in vacuum and the second end is aligned along the measurement axis. The first end is set with a transparent partition wall as a particle shield (15), in the measuring range of pyrometer. A pyrometer windscreen (14) is formed at the second end where normal pressure is applied. The particle shield is made of an optically transparent material such as fluoride or it consists of barium. An independent claim is included for a vacuum treatment plant.