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摘要
申请公布号
JP5179714(B2)
申请公布日期
2013.04.10
申请号
JP20050316818
申请日期
2005.10.31
申请人
发明人
分类号
H01L21/822;H01G4/33;H01G13/00;H01L27/04
主分类号
H01L21/822
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