Particle-optical systems and arrangements and particle-optical components for such systems and arrangements

摘要

A particle-optical arrangement, comprises at least one charged-particle source 319 for generating at least one beam of charged particles, at least one multi-aperture plate 313 having a plurality of apertures formed in the plate, wherein the plurality of apertures is arranged in a first pattern, wherein a plurality of charged-particle beamlets is formed from the beam of charged particles downstream of the aperture plate; and a first focusing lens 303 providing a magnetic field having a focusing field portion in a region between the charged-particle source and the multi-aperture plate; wherein the at least one charged-particle source is arranged within the magnetic field provided by the first focusing lens.