| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To correct a change in an output level of a sensor, which may be caused by a light quantity change with the lapse of time and a sensitivity change of each light receiving element itself of the sensor. <P>SOLUTION: A correction apparatus for correcting output data from the sensor includes the following circuits. An offset circuit illuminates a sample, receives light transmitted or reflected through/by the sample, inputs output data from the sensor for outputting image data, and performs offset correction. A gain correction circuit inputs a gain correction coefficient and performs gain correction by the inputted gain correction coefficient. An average value calculation circuit calculates an average value of respective pixel values by using sensor output data acquired on a position where light is transmitted from a pattern in a transmission state or on a position where light is reflected from the pattern in a reflection state out of sensor output data processed by offset correction and gain correction. A gain correction coefficient calculation circuit corrects the gain correction coefficient to be used for gain correction by using a change rate of the average value from a set reference value and feeds back the corrected gain correction coefficient to the gain correction circuit. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
