Scanning white-light interferometer and method for spatially resolved optical measurement of the surface geometry of an object

摘要

The interferometer has a light source (2) that is provided for generating the output beam which is split into measuring beam (7) and reference beam (8). The measuring beam reflected from object (1) is fed back into the optical path of interferometer such that reference beam is superimposed with the reference beam with respect to surface of photo sensors. The synchronous movement of displacement detector (12) is performed relative to the rectilinear scale (11) with respect to change of optical path length of measurement and reference beams. An independent claim is included for method for spatially resolved optical measurement of height of geometric data of object.