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摘要
申请公布号
JP5179848(B2)
申请公布日期
2013.04.10
申请号
JP20070311922
申请日期
2007.12.03
申请人
发明人
分类号
H01L21/822;H01L27/04;H03B5/12;H03K3/282;H03K19/0944
主分类号
H01L21/822
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