发明名称 METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
摘要 <p>There is disclosed a method of manufacturing a piezoelectric element including a step of preparing a green sheet A including a portion which becomes a fired piezoelectric body later by use of a piezoelectric material; a step of joining, to at least one surface of the green sheet A, a green sheet B having an opening in a portion facing the portion which becomes the fired piezoelectric body later, followed by firing to obtain the fired piezoelectric body provided with a reinforcing plate to which the reinforcing plate formed owing to the firing of the green sheet B is attached; and a step of forming a film-like electrode in a portion obtained by the firing of the green sheet A in the fired piezoelectric body provided with the reinforcing plate. According to this method of manufacturing a piezoelectric element, it is possible to obtain the piezoelectric element provided with a thin fired piezoelectric body having a high flatness degree.</p>
申请公布号 EP2579350(A1) 申请公布日期 2013.04.10
申请号 EP20110786668 申请日期 2011.05.25
申请人 NGK INSULATORS, LTD. 发明人 OHNISHI, TAKAO;SHIMIZU, HIDEKI;EBIGASE, TAKASHI
分类号 H01L41/22;C04B35/622;H01L41/09;H01L41/187;H01L41/29;H01L41/33;H01L41/43;(IPC1-7):H01L41/24 主分类号 H01L41/22
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