发明名称 |
METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT |
摘要 |
<p>There is disclosed a method of manufacturing a piezoelectric element including a step of preparing a green sheet A including a portion which becomes a fired piezoelectric body later by use of a piezoelectric material; a step of joining, to at least one surface of the green sheet A, a green sheet B having an opening in a portion facing the portion which becomes the fired piezoelectric body later, followed by firing to obtain the fired piezoelectric body provided with a reinforcing plate to which the reinforcing plate formed owing to the firing of the green sheet B is attached; and a step of forming a film-like electrode in a portion obtained by the firing of the green sheet A in the fired piezoelectric body provided with the reinforcing plate. According to this method of manufacturing a piezoelectric element, it is possible to obtain the piezoelectric element provided with a thin fired piezoelectric body having a high flatness degree.</p> |
申请公布号 |
EP2579350(A1) |
申请公布日期 |
2013.04.10 |
申请号 |
EP20110786668 |
申请日期 |
2011.05.25 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
OHNISHI, TAKAO;SHIMIZU, HIDEKI;EBIGASE, TAKASHI |
分类号 |
H01L41/22;C04B35/622;H01L41/09;H01L41/187;H01L41/29;H01L41/33;H01L41/43;(IPC1-7):H01L41/24 |
主分类号 |
H01L41/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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