发明名称
摘要 <p>Apparatus for plasma treating a surface, comprising a dielectric housing (10)having an inlet (11) and an outlet, a means for causing a process gas to flow from the inlet to the outlet, a means for generating a non-equilibrium atmospheric pressure plasma in the process gas, a tube (13) formed at least partly of dielectric material extending outwardly from the outlet of the housing (10), whereby the end of the tube (14) forms the plasma outlet and the plasma extends from the electrode (12) to the plasma outlet (14), means for moving the surface to be treated relative to the plasma outlet (14) while maintaining the surface adjacent to the plasma outlet (14) and an atomiser for atomising a surface treatment agent positioned within the housing (10).</p>
申请公布号 JP5180585(B2) 申请公布日期 2013.04.10
申请号 JP20070539632 申请日期 2005.11.03
申请人 发明人
分类号 H05H1/24;B01J19/08;C23C16/32 主分类号 H05H1/24
代理机构 代理人
主权项
地址
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