发明名称 SURFACE RELIEF DETERMINING METHOD
摘要 FIELD: measurement equipment.SUBSTANCE: surface relief determining method involves movement along the investigated surface of a set of sensitive elements and recording of their readings proportional to relief changes. Sensitive elements are elastic; they do not contact each other and tightly fill in the plane area above the investigated surface section; they are arranged in field of vision of speckle interferometer; specklogram of sensitive elements is recorded as a reference one prior to the beginning of their movement along the investigated surface and their specklogram at each time moment during movement; those specklograms are compared by means of deduction, and as per the speckle interferometer obtained as a result of comparison, in which simultaneous real-time recording of the lines of micromovement level of all sensitive elements of the set in the form of speckle interferometer bands is performed, and deflection of each sensitive element is determined as per the corresponding fragment of speckle interferogram.EFFECT: increasing informativity on the surface profile, and information retrieval and processing speed.3 dwg
申请公布号 RU2479063(C1) 申请公布日期 2013.04.10
申请号 RU20110146313 申请日期 2011.11.16
申请人 FEDERAL'NOE GOSUDARSTVENNOE BJUDZHETNOE UCHREZHDENIE NAUKI INSTITUT PROBLEM MEKHANIKI IM. A.JU. ISHLINSKOGO ROSSIJSKOJ AKADEMII NAUK (IPMEKH RAN) 发明人 GOL'DSHTEJN ROBERT VENIAMINOVICH;KOZINTSEV VIKTOR MIKHAJLOVICH;PODLESNYKH ALEKSEJ VIKTOROVICH;POPOV ALEKSANDR LEONIDOVICH;SAMOKHVALOV GENNADIJ VASIL'EVICH;SOLODOVNIKOV SERGEJ IVANOVICH;CHELJUBEEV DMITRIJ ANATOL'EVICH
分类号 H01J37/28;G01B9/00 主分类号 H01J37/28
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