发明名称 |
DYNAMIC MODE AFM APPARATUS |
摘要 |
There is provided a dynamic mode AFM apparatus that configures an automatic control system which can automatically obtain a probe-sample distance, and allows high-speed identification of atoms of the sample surface. The dynamic mode AFM apparatus comprises: a scanner 3 for performing three-dimensional relative scanning of a cantilever 2 and a sample 1; a means 8 for generating an AC signal of a resonance frequency in a mode with flexural vibration of the cantilever 2; a means 9 for exciting the flexural vibration of the cantilever 2 with the resonance frequency; a means 10 for generating an AC signal of a second frequency which is lower than the frequency of the flexural vibration; a means 11 for modulating a probe 2A-sample 1 distance of the cantilever 2 with the second frequency; a means 5 for detecting fluctuation of the resonance frequency; a means 4 for detecting vibration of the cantilever; and a means 6 for detecting a fluctuation component which is contained in a detected signal by the means 5 for detecting the resonance frequency fluctuation and synchronized with a modulation signal of the probe 2A-sample 1 distance, wherein an inclination of the resonance frequency against the probe 2A-sample 1 distance is obtained from the strength and polarity of the fluctuation component. |
申请公布号 |
EP2275798(A4) |
申请公布日期 |
2013.04.10 |
申请号 |
EP20090746445 |
申请日期 |
2009.04.08 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY AGENCY |
发明人 |
KAWAKATSU, HIDEKI;KOBAYASHI, DAI |
分类号 |
G01Q60/34;B82Y35/00 |
主分类号 |
G01Q60/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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