发明名称 |
Sensor for detecting thermal radiation |
摘要 |
A sensor having a monolithically integrated structure for detecting thermal radiation includes: a carrier substrate, a cavity, and at least one sensor element for detecting thermal radiation. Incident thermal radiation strikes the sensor element via the carrier substrate. The sensor element is suspended in the cavity by a suspension. |
申请公布号 |
US8415760(B2) |
申请公布日期 |
2013.04.09 |
申请号 |
US20100806347 |
申请日期 |
2010.08.10 |
申请人 |
MUELLER THORSTEN;FEYH ANDO;ROBERT BOSCH GMBH |
发明人 |
MUELLER THORSTEN;FEYH ANDO |
分类号 |
H01L29/66 |
主分类号 |
H01L29/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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