发明名称 Process of producing liquid discharge head base material
摘要 A process includes preparing a base material having a first surface provided with an element generating energy that is used for discharging a liquid and an electrode layer that is connected to the element; forming a hollow on a second surface, which is the surface on the opposite side of the first surface, of the base material, wherein part of the electrode layer serves as the bottom face of the hollow; covering the surface of the base material and the bottom face forming the inner face of the hollow with an insulating film; and partially exposing the electrode layer by removing part of the insulating film covering the bottom face using laser light.
申请公布号 US8415178(B2) 申请公布日期 2013.04.09
申请号 US12871233 申请日期 2010.08.30
申请人 发明人
分类号 H01L0021/000000;H01L0021/000050;H01L0021/000048;H01L0021/000044 主分类号 H01L0021/000000
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