| 摘要 |
PURPOSE: A circuit test probe card and a probe substrate structure thereof are provided to effectively test an analysis target even if an interval between test points is small. CONSTITUTION: A probe substrate(110') includes a main substrate(10) and multiple strands of conductive wires(40), and the multiple strands of conductive wires penetrate the main substrate. The both ends of the multiple strands of conductive wires are exposed to the upper and lower surfaces of each main substrate. Multiple top contact points(20) are formed in the upper surface of the main substrate, and each of the multiple strands of conductive wires are electrically connected. The interval(H) between the multiple strands of conductive wires exposed in the upper surface is larger than the interval(h) between the multiple strands of conductive wires exposed in the lower surface.
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