EVAPORATION SOURCE AND FILM FORMING APPARATUS

摘要

PURPOSE: An evaporation source and a film forming apparatus are provided to reduce malfunction and damage by preventing the creeping-up phenomenon of aluminum. CONSTITUTION: A crucible includes an inner crucible(2) and an outer crucible(1). The inner crucible includes an accommodating part. The outer crucible includes an opening part. The direction of the opening part of the outer crucible is different from the direction of the opening part of the inner crucible. The lower surface of the inner crucible touches the side surface of the outer crucible. [Reference numerals] (AA) Opening part; (BB,DD) Side part; (CC) Lower part; (EE) Horizontal part;