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发明名称
PLASMA OXIDATION AND REMOVAL OF OXIDIZED MATERIAL
摘要
申请公布号
KR20130036066(A)
申请公布日期
2013.04.09
申请号
KR20137003686
申请日期
2006.02.27
申请人
LAM RESEARCH CORPORATION
发明人
KIM, YUN SANG;BAILEY ANDREW III;YOON HYUNGSUK ALEXANDER;HOWALD ARTHUR M.
分类号
H01L21/28;H01L21/3065
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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