发明名称 APPARATUS FOR TRANSFERRING A SUBSTRATE
摘要 <p>PURPOSE: A substrate transferring apparatus is provided to prevent a transfer roller from being damaged by including a transfer belt on the outer sides of a plurality of transfer rollers. CONSTITUTION: A plurality of transfer rollers(200) are formed on the lower side of a substrate and erectly transfers the substrate. A plurality of guide rollers(400) guide the transferred substrate. A transfer belt(300) surrounds the outer sides of a plurality of transfer rollers. One side of the transfer roller is contacted to the lower side of the substrate.</p>
申请公布号 KR20130035377(A) 申请公布日期 2013.04.09
申请号 KR20110099626 申请日期 2011.09.30
申请人 FNS TECH CO., LTD. 发明人 PARK, BYUNG WOO;JI, YONG HYUN;PARK, WOO YOUL
分类号 H01L21/677;B65G49/06;B65G49/07;G02F1/13 主分类号 H01L21/677
代理机构 代理人
主权项
地址