发明名称 |
APPARATUS FOR TRANSFERRING A SUBSTRATE |
摘要 |
<p>PURPOSE: A substrate transferring apparatus is provided to prevent a transfer roller from being damaged by including a transfer belt on the outer sides of a plurality of transfer rollers. CONSTITUTION: A plurality of transfer rollers(200) are formed on the lower side of a substrate and erectly transfers the substrate. A plurality of guide rollers(400) guide the transferred substrate. A transfer belt(300) surrounds the outer sides of a plurality of transfer rollers. One side of the transfer roller is contacted to the lower side of the substrate.</p> |
申请公布号 |
KR20130035377(A) |
申请公布日期 |
2013.04.09 |
申请号 |
KR20110099626 |
申请日期 |
2011.09.30 |
申请人 |
FNS TECH CO., LTD. |
发明人 |
PARK, BYUNG WOO;JI, YONG HYUN;PARK, WOO YOUL |
分类号 |
H01L21/677;B65G49/06;B65G49/07;G02F1/13 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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