发明名称 METHOD OF FORMING STACKED TRENCH CONTACTS AND STRUCTURES FORMED THEREBY
摘要 Methods and associated structures of forming a microelectronic device are described. Those methods may include forming a structure comprising a first contact metal disposed on a source/drain contact of a substrate, and a second contact metal disposed on a top surface of the first contact metal, wherein the second contact metal is disposed within an IID disposed on a top surface of a metal gate disposed on the substrate.
申请公布号 KR101252927(B1) 申请公布日期 2013.04.09
申请号 KR20107021369 申请日期 2009.06.26
申请人 发明人
分类号 H01L21/28;H01L21/336;H01L29/78 主分类号 H01L21/28
代理机构 代理人
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