| 摘要 |
The utility model provides a substrate transfer robot advantaged by simple structure and good rigidity. The substrate transfer robot (R) is provided with a rotating structural body (20) capable of being rotatably disposed, a lifting unit (30) capable of lifting relative to the rotating structural body (20), and arms (50, 60) disposed in the lifting unit (30); the rotating structural body (20) is provided with a rotating structural base part (21) and a pair of supports (22, 22) vertically disposed on the rotating structural base part (21); an arm (50) is a connecting structure with a plurality of arm sheets (51, 52) capable of flexion and extension, and is a structure that the top end of the arm (50) can advance and retreat to be at an arm-entering position and an arm-retreating position via the pair of supports (22, 22); the lifting unit (30) is provided with a lifting frame (40) offsetting to an arm entering side compared with the supports (22, 22); a root end part of the arm (50) is connected with the lifting frame (40). |
