| 摘要 |
PURPOSE: A nozzle of a point source is provided to uniformly spread an organic material on a large area substrate by vertically injecting the organic material to a scanning direction. CONSTITUTION: Multiple point sources are installed in a linear source. An organic layer is deposited on a substrate. The nozzle(60) covers the upper part of the point source including the volatile organic material. An asymmetric slot(61) is formed in the nozzle. The narrow part of the nozzle is moved to the scan direction of a volatile source. |
