HIGH-VOLTAGE POWER DEVICE FOR PLASMA HAVING PULSE OUTPUT

摘要

PURPOSE: A high voltage power supply apparatus for the plasma having the pulse power is provided to disperse the capacity of the power supply and reduce the electrification loss of a switch per an inverter stack, thereby minimizing the inner pressure and capacity of a switching element. CONSTITUTION: A rectifying part(102) converts the AC voltage into the DC voltage. A converter part(103) pressures up or down for a switching operation of the converted DC voltage. A controller(203) produces a control signal of a pulse wide changing method. A first gate drive part(202a) receives an input of the control signal from the controller and outputs the pulse width changing signal for driving the gate of the inverter. A second gate drive part(202b) outputs a signal with the first gate driver part alternatively. A first inverter stack part(201a) receives the pulse width changing signal from the first gate drive part, operates the gate of the inverter switch and outputs as the pulse signal. A second inverter stack part(201b) receives the pulse width changing signal from the second gate drive part, operates the gate of the inverter switch and outputs as the pulse signal. A pulse step-up part(105) pressures up by inputting the pulse output in which is outputted from the first inverter stack part and the second inverter stack part. [Reference numerals] (102) Rectifying part; (103) Converter part; (105) Pulse step-up part; (106) Capacitive load; (201a) First inverter stack part; (201b) Second inverter stack part; (202a) First gate drive part; (202b) Second gate drive part; (203) Controller;