发明名称 Semiconductor device having a multilayer structure
摘要 A semiconductor device includes a semiconductor substrate including a bump electrode, a first insulating layer formed on the semiconductor substrate and arranged to a lateral direction of the bump electrode, a first wiring layer formed on the first insulating layer and connected to the bump electrode, a second insulating layer formed on the first wiring layer, a via hole formed in the second insulating layer, and reaching the first wiring layer, a second wiring layer formed on the second insulating layer and connected to the first wiring layer via a via conductor formed in the via hole, and an external connection terminal connected to the second wiring layer, wherein an elastic modulus of the second insulating layer is set lower than an elastic modulus of the first insulating layer.
申请公布号 US8415796(B2) 申请公布日期 2013.04.09
申请号 US201113117326 申请日期 2011.05.27
申请人 YAMANO TAKAHARU;SHINKO ELECTRIC INDUSTRIES CO., LTD. 发明人 YAMANO TAKAHARU
分类号 H01L23/495 主分类号 H01L23/495
代理机构 代理人
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