发明名称 Stage for scanning probe microscopy and sample observation method
摘要 It is an object of the invention to provide a stage for scanning probe microscopy that can be used in any kind of SPM and can effectively irradiate light to a sample and a solution near the sample without irradiated light blocked by a cantilever. The stage for scanning probe microscopy of the invention is a stage for scanning probe microscopy for fixing a sample substrate that mounts a sample to be observed thereon and has optical transparency and includes an opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view. Light is irradiated from a bottom surface of the sample substrate onto the sample through the opening.
申请公布号 US8418261(B2) 申请公布日期 2013.04.09
申请号 US20080994581 申请日期 2008.06.27
申请人 KASAI NAHOKO;HARADA YUICHI;RAMANUJAN CHANDRA SEKAR;NIPPON TELEGRAPH AND TELEPHONE CORPORATION;ISIS INNOVATION LIMITED 发明人 KASAI NAHOKO;HARADA YUICHI;RAMANUJAN CHANDRA SEKAR
分类号 G01Q70/02;G01Q30/02 主分类号 G01Q70/02
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