发明名称 |
Stage for scanning probe microscopy and sample observation method |
摘要 |
It is an object of the invention to provide a stage for scanning probe microscopy that can be used in any kind of SPM and can effectively irradiate light to a sample and a solution near the sample without irradiated light blocked by a cantilever. The stage for scanning probe microscopy of the invention is a stage for scanning probe microscopy for fixing a sample substrate that mounts a sample to be observed thereon and has optical transparency and includes an opening that is provided below a portion where the sample substrate is fixed and that has an opening area included within the sample substrate in plan view. Light is irradiated from a bottom surface of the sample substrate onto the sample through the opening.
|
申请公布号 |
US8418261(B2) |
申请公布日期 |
2013.04.09 |
申请号 |
US20080994581 |
申请日期 |
2008.06.27 |
申请人 |
KASAI NAHOKO;HARADA YUICHI;RAMANUJAN CHANDRA SEKAR;NIPPON TELEGRAPH AND TELEPHONE CORPORATION;ISIS INNOVATION LIMITED |
发明人 |
KASAI NAHOKO;HARADA YUICHI;RAMANUJAN CHANDRA SEKAR |
分类号 |
G01Q70/02;G01Q30/02 |
主分类号 |
G01Q70/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|