发明名称 LIQUID CONTROL APPARATUS
摘要 <p>PURPOSE: A liquid control device is provided to promote the spreading of a liquid toward a temperature sensor side with the help of a gas flow from an inlet to an outlet thanks to the fact that a feeding hole formed at a main body is formed at a gas inlet side rather than the temperature sensor side, and thereby efficiently spreading a liquid supplied from the feeding hole toward the temperature sensor side. CONSTITUTION: A liquid control device(30) controlling the spreading of a liquid is equipped with a main body(31) and a mesh unit(47). The main body has a receiving surface(31c) supplied with a liquid. The mesh unit is woven in the shape of a net and installed to touch the receiving surface. A heater heating the receiving surface is installed at the inside of the main body, and a feeding hole supplying the liquid from the inside of the main body to the receiving surface is formed at the main body, and a groove(41) suppressing the spreading of the liquid from the feeding hole to the opposite side of the heater is formed on the receiving surface. A gas inlet and a gas outlet(34a) are formed at the main body, and the inlet is an opening introducing gas from the inside of the main body to a space around the receiving surface, and the outlet is an opening discharging the gas from the space into the inside of the main body, and the inlet and the outlet are formed with the heater placed in between.</p>
申请公布号 KR20130035882(A) 申请公布日期 2013.04.09
申请号 KR20120103259 申请日期 2012.09.18
申请人 CKD CORPORATION 发明人 KOUKETSU MASAYUKI;ITAFUJI HIROSHI
分类号 B01D1/22;B01J7/00;B05C11/02;H01L21/027 主分类号 B01D1/22
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