| 摘要 |
PURPOSE: A surface monitoring device and method are provided to confirm a state of a target object using changes in measured scattering signals, thereby reducing the influence caused by the changes in an external environment when confirming the state. CONSTITUTION: A surface monitoring device(100) comprises a beam splitter(103), a lens(105), a controller(109), a first sensor(111-1), a second sensor(111-2), and a processor(113). The beam splitter transmits first laser beams among the laser beams emitted by a laser unit(101) and reflects second laser beams. The lens condenses the transmitted first laser beams. The control unit controls at least one of the first and second transmitting units(107-1,107-2) radiating the laser beams to a target object(115). The first sensor receives the first scattering signals scattered in the rear of the target object. The second sensor receives the second scattering signals scattered to a direction of the first scattering signals from the target object. The processor confirms a state of the target object using at least one or the first and second scattering signals. [Reference numerals] (101) Laser unit; (103) Beam splitter; (105) Lens; (107-1) First transmitting unit; (107-2) Second transmitting unit; (109) Controller; (111-1) First sensor; (111-2) Second sensor; (111-3) Third sensor; (113) Processor; |
