发明名称 SOLDERBALL TEST DEVICE
摘要 PURPOSE: A solder ball inspecting apparatus is provided to easily inspect a solder ball by including a lens assembly, a specimen chamber, and a specimen chamber driving unit. CONSTITUTION: An optical source(110) emits light to an object. An image detecting unit detects an image of the object. An image processor(120) processes the detected image. A specimen chamber(140) holds and inspects a specimen. A specimen chamber driving unit(150) drives the specimen chamber.
申请公布号 KR20130035061(A) 申请公布日期 2013.04.08
申请号 KR20110099309 申请日期 2011.09.29
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 LEE, YOUNG JU;PARK, SEONG CHAN;HAM, SUK JIN
分类号 H01L21/66;H01L21/60 主分类号 H01L21/66
代理机构 代理人
主权项
地址