SUSCEPTOR SUPPORTING A WAFER

摘要

PURPOSE: A susceptor for supporting a wafer is provided to increase a rotation speed of a satellite to support the wafer without increasing the amount of gases passing through a gas hole. CONSTITUTION: A main disc includes a mounting part on which a satellite rotates. A gas hole(330) is formed in one side of a gas flow path with a preset depth and a preset width. An axis width part(340) is formed in the gas flow path and becomes narrower from one side to the other side of the gas flow path.