SUSCEPTOR FOR SUPPORTING A WAFER

摘要

PURPOSE: A susceptor for supporting a wafer is provided to reduce manufacturing costs by removing a gas flow path process. CONSTITUTION: A main disc(200) has an inner part(210) formed in the center thereof and an outer part(230) formed on the outer side thereof. The main disc includes a mounting part on which a satellite(100) rotates. First to third gas outlets(311-313) are formed on the surface of the mounting part. First to third inner channels(411-413) are formed in the main disc. An inclined channel is upwardly inclined to and connected to the inner channel between the gas outlets formed on the mounting part and the inner channel. The inclined channel includes first to third inclined channels(511-513).