CRYSTALLIZATION METHOD AND METHOD OF FABRICATING THIN FILM TRANSISTOR USING THEREOF

摘要

PURPOSE: A crystallizing method and a method for manufacturing a thin film transistor are provided to improve the uniformity of an optical system by increasing the periodicity of a coherent length. CONSTITUTION: A homogenizer array set(160a,160b) is divided into n number of parts. A condensing lens(170) is installed on the front of the divided part. An amorphous silicon thin film is formed on a substrate. A green laser beam is scanned on the amorphous silicon thin film. The amorphous silicon thin film is crystallized to a polycrystalline silicon thin film.